SemiFlows
FlowsChatAdvantagesPricingFAQAboutBlog
  1. Home
  2. /
  3. Process Flows
  4. /
  5. 28nm

28nm Process FlowPlanar MOSFET

Mature process node with full coverage from STI to Final Passivation. Ideal for learning semiconductor manufacturing fundamentals and HKMG integration.

28nm Planar Flow

266 steps

Step index

  • Active Area · AA Pad Oxidation
  • Active Area · AA Pad Nitride Deposition
  • Active Area · AA Amorphous Carbon Deposition
  • Active Area · AA N-free DARC Deposition
  • Active Area · AA Cap Oxide Deposition
View full flow →

SemiFlows

Semiconductor process knowledge — flow visualization + Flow-aware, evidence-linked Q&A

FlowsFlow ChatAdvantagesPricingAboutFAQBlogConceptsContact Us

© 2026 SemiFlows. All rights reserved.

Terms of ServiceRefund PolicyPrivacy Policysupport@semiflows.comPayments by Paddle.com