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Built for semiconductor process engineers & learners

See the complete process flow — every step, and every why

Complete 40nm→7nm flows, rendered step-by-step in 2.5D cross-sections and grounded in papers, patents & textbooks — with an AI you can ask. Every claim cited.

Process flow visualization

14nm RMG (HKMG replacement-metal-gate) process cross-section — stacked Gate Cut + Fin Cut

4 technology nodes · 40nm→7nm · 2.5D cross-sections

  • Step-by-step flow navigation
  • 2D cross-section for every step
  • Rationale + citation tracing
40nm full flow — freeStart free with 40nmExplore flows

Sample answer

Why must the high-k layer in HKMG be deposited by ALD?

In HKMG integration, high-k dielectrics such as HfO₂ must be deposited by atomic layer deposition (ALD) rather than CVD/PVD: ALD's self-limiting surface reactions give sub-nanometer thickness control and excellent conformality , critical for EOT scaling and gate-leakage control . Layer-by-layer growth of the interfacial layer and high-k also suppresses oxygen-vacancy defects, reducing threshold-voltage shift .

Grounded · 3 sourcesGrounding: Strong2 papers · 1 textbooksMechanism-verified
[T1]

Atomic Layer Deposition of High-κ Dielectrics

(2018)

[P1]

EOT Scaling and Gate Leakage in HKMG Stacks

2016

Try the AI Q&A

Why SemiFlows over General AI?

General AI is a good tool, but semiconductor processes demand a specialized engine

Curated Corpus + Citation Tracing

Extensive papers + patents + textbooks — every answer tagged with [T1][P2][A3] source IDs, traceable to original text

General AI: general internet corpus, frequently fabricates non-existent references

Mechanism-Aware AI Engine

Automatically infers process type and functional role, with deep mechanism analysis grounded in paper data and patented solutions

General AI: stays at textbook overview level, unaware of relationships between process steps

Complete Process Flow Visualization

Step-by-step navigation of 1,700+-step flows (40nm CIS / 28nm / 14nm / 7nm), plus a 2D process cross-section for each step to watch the material stack take shape (live for 28nm and 14nm, more nodes rolling out)

General AI: text-only output, no process flow visualization

Pricing

Two parallel offerings — mix freely: process-flow nodes (one-time, lifetime) + AI deep Q&A (subscription, free tier included)

One-time · lifetime

Technology Nodes

One-time purchase, lifetime access

28nm

$49
  • 266-step complete process flow
  • Rationale & risk analysis per step
  • Paper & patent citation tracing
  • HKMG integration details
  • 2D process cross-section for every step — physical structure evolution, step by step
  • Includes 300 AI chat credits/month
  • One-time purchase, lifetime access

14nm

$149
  • 362-step FinFET process flow
  • Rationale & risk analysis per step
  • Paper & patent citation tracing
  • Multi-patterning + MOL integration
  • 2D process cross-section for every step — physical structure evolution, step by step
  • Includes 300 AI chat credits/month
  • One-time purchase, lifetime access

7nm

$349
  • 716-step advanced process flow
  • Rationale & risk analysis per step
  • Paper & patent citation tracing
  • SAQP patterning + self-aligned contacts
  • Includes 300 AI chat credits/month
  • One-time purchase, lifetime access

Pay with card, UPI, or WeChat Pay (desktop)

Subscription · optional

AI Deep Analysis

Subscribe to AI deep analysis after purchasing any process flow

Free

$0

Try AI process Q&A

  • 120 AI chat credits/month
  • Quick answer mode
  • Basic citation tracing
Sign Up Free

Owner

$0

Included with any node purchase

  • 300 AI chat credits/month
  • Quick answer mode
  • Basic citation tracing
  • Full process flow access

Pro

Recommended
$19/mo

Smart reasoning + deep knowledge retrieval

  • 6,000 AI chat credits/month
  • Smart reasoning engine (multi-model)
  • Full citation tracing (papers/patents/textbooks)
  • Deep knowledge retrieval + process context analysis

Requires any node — the free Owner tier comes with any node purchase

All Access Pro

Save vs buying separately

All nodes lifetime access + Pro AI for 1 year

Renews at $180/yr (Pro AI only)

$727$479

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Frequently Asked Questions

Common questions about the SemiFlows platform

SemiFlows is an AI-powered semiconductor process knowledge platform that provides complete, step-by-step process flows from 40nm to 7nm, covering both logic chips and CMOS image sensors. It integrates extensive research papers, patents, and authoritative textbooks to deliver in-depth rationale analysis with citation tracing for each process step. The 40nm BSI CIS flow is entirely free.

SemiFlows currently covers four process flows: 40nm BSI CMOS Image Sensor (417 steps, free), 28nm Planar (266 steps), 14nm FinFET (362 steps), and 7nm FinFET (716 steps). Together, these flows provide over 1,700 detailed process steps spanning both logic chip and image sensor fabrication.

Unlike general AI assistants, SemiFlows is purpose-built for semiconductor process engineering. Every answer is grounded in curated academic papers, patents, and textbooks — not general internet knowledge. The platform provides citation-backed explanations with traceable references, structured process flows, and domain-specific context that general AI tools cannot match.

SemiFlows provides physics and chemistry principles behind each process step, mechanism explanations (why a process works), integration rationale (why steps are ordered a certain way), and risk analysis. All content focuses on fundamental principles — not specific manufacturing recipes, equipment parameters, or vendor details.

Yes. SemiFlows supports both English and Chinese (中文). Users can switch languages at any time using the language toggle. The AI chat assistant also responds in the user's selected language.

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