AA Cap Oxide Deposition creates a dense inorganic layer that suppresses outgassing from underlying amorphous carbon during thermal processing [P3].
The AA Cap Oxide Deposition step is inserted after the N-free DARC and amorphous carbon stack formation to create an inorganic capping layer that mechanically and chemically stabilizes the underlying organic films during subsequent lithography and etch processing [P1]. In the 28 nm planar STI-related AA modu…
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