STI Liner Oxidation - 40nm | SemiFlows

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STI Liner Oxidation

25SiN Hard Mask Deposition 26SiO Hard Mask Deposition 27Pre Litho Cleaning 28Shallow Trench Isolation - Photo 29Oxide Etch 30Nitride Etch 31Si Etch 32Ashing & Strip/Clean 33Trench Sidewall Passivation 34STI Liner Oxidation 35STI Fill Conformal CVD Liner 36STI Fill Liner Etchback 37Oxidation Preaclean 38STI Fill Conformal CVD Oxide 39STI Fill Post Clean 40STI Conformal CVD Anneal 41Pre-CMP Oxide Deposition 42STI CMP 43STI CMP Post Cleaning 44STI Final Densification Anneal 45Wet Deglaze Etch 46SiN Strip 47Blanket B Well Implant

Process Cross-Section

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Step highlight

Liner oxidation consumes exposed silicon to form an oxide interface, modifying trench corners and stress conditions before subsequent isolation filling (Engineering Practice).

In depth

Preparing the isolation interface

STI Liner Oxidation follows trench etching and surface preparation, providing oxidi…

Related steps

SiN Hard Mask Deposition
SiO Hard Mask Deposition
Pre Litho Cleaning
Shallow Trench Isolation - Photo
Oxide Etch
Nitride Etch