Technical Blog
Deep dive into the physics and integration logic of semiconductor manufacturing
40nm BSI CMOS Image Sensor Metal-Three Interconnect Integration: Process Flow Principles and Device Physics
Role in the Complete Flow In the 40nm backside illumination (BSI) complementary metal-oxide-semiconductor (CMOS) image sensor fabrication sequence, the metal-th
40nm BSI CMOS Image Sensor Lower Optical Clear-Layer Integration Process Flow: Principles, Mechanisms, and Integration Logic
Role in the Complete Flow In a 40nm backside illumination (BSI) complementary metal-oxide-semiconductor (CMOS) image sensor, the lower optical clear-layer (LOCL
14nm FinFET Shallow Trench Isolation Notch Integration: Process Flow Principles and Mechanism Deep Dive
Role in the Complete Flow In the 14nm FinFET technology node, the shallow trench isolation (STI) notch module occupies a uniquely critical position within the b
14nm FinFET Sidewall Spacer Integration Process Flow: Principles, Mechanisms, and Module Dependencies
Role in the Complete Flow The sidewall spacer module in a 14nm FinFET process flow occupies a pivotal position between gate patterning and source/drain (S/D) ep
14nm FinFET Shallow Trench Isolation Process Flow: Integration Principles, Physical Mechanisms, and Module Dependencies
Role in the Complete Flow In the 14nm FinFET process flow, the shallow trench isolation (STI) module occupies a foundational position: it is the first major str
14nm FinFET Embedded Silicon Germanium Source-Drain Integration: Process Flow Principles and Strain Engineering Mechanisms
Role in the Complete Flow In the 14nm FinFET technology node, the embedded silicon germanium (eSiGe) source-drain module serves as one of the most performance-c
14nm FinFET Well and Channel Implant Integration Process Flow: Principles, Mechanisms, and Module Dependencies
Role in the Complete Flow The well and channel implant integration module sits at a critical juncture in the 14nm FinFET process flow, bridging the gap between
14nm FinFET Process Flow: Integration Logic, Device Physics, and Module Dependencies
Process Map and Scope The 14nm FinFET process flow represents a defining moment in semiconductor scaling: the second generation of three-dimensional transistors
7nm FinFET Dummy-Poly Opening and Planarization Process Flow: Integration Principles, Physical Mechanisms, and Module Dependencies
Role in the Complete Flow The 7nm FinFET dummy-poly opening and planarization (POP) module sits at a pivotal junction in the replacement metal gate (RMG) integr
40nm BSI CMOS Image Sensor Upper Optical Clear-Layer and Microlens Integration: Process Flow Principles and Physics
Role in the Complete Flow The 40nm BSI CMOS Image Sensor upper optical clear-layer and microlens integration module sits at the very top of the backside optical
14nm FinFET Replacement Metal Gate Integration Process Flow: Principles, Mechanisms, and Integration Logic
Role in the Complete Flow The replacement metal gate (RMG) module occupies a pivotal position in the 14nm FinFET process flow, serving as the bridge between fro
7nm FinFET Shallow Trench Isolation Process Flow: Integration Principles and Device Physics
Role in the Complete Flow In a 7nm FinFET process flow, the shallow trench isolation (STI) module occupies a critical position between substrate preparation and