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14nm Process FlowFinFET

Advanced process node with 3D transistor architecture. Explore FinFET integration, multi-patterning, and advanced interconnect technologies.

14nm FinFET

362 steps

Step index

  • Wafer Start · substrate
  • Fin Pattern · Pad Oxide Growth
  • Fin Pattern · Pad Nitride Deposition
  • Fin Pattern · Stop Oxide Deposition
  • Fin Pattern · a-Si Hardmask Deposition
View full flow →

Node knowledge map

14nm Process Integration Library

Start with the node overview, then open the physics and integration logic for each module. Every article returns to its exact Flow step.

Node overview14nm FinFET Process Flow: Integration Logic, Device Physics, and Module Dependencies
  1. 01WFR14nm FinFET Starting Wafer and Substrate Preparation: Integration Logic, Physics, and Module Fundamentals
  2. 02FIN_PATTERN14nm FinFET Fin Patterning Process Flow: Integration Principles, Physics, and Module Dependencies
  3. 18FIN_CUT14nm FinFET Fin Cut Integration Process Flow: Principles, Mechanisms, and Module Dependencies
  4. 29STI

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14nm FinFET STI Process Flow: Integration Principles, Physical Mechanisms, and Module Dependencies
  • 53STI_NOTCH14nm FinFET Shallow Trench Isolation Notch Integration: Process Flow Principles and Mechanism Deep Dive
  • 65FIN_RECESS14nm Fin Trench Etch and Fin Recess Integration
  • 68GATE14nm FinFET Gate Stack Integration Process Flow: Principles, Mechanisms, and Module Dependencies
  • 93IMPLANT14nm FinFET Well and Channel Implant Integration Process Flow: Principles, Mechanisms, and Module Dependencies
  • 97SPACER14nm FinFET Sidewall Spacer Integration Process Flow: Principles, Mechanisms, and Module Dependencies
  • 129CESL_PMD14nm FinFET Contact Etch-Stop and Pre-Metal Dielectric Integration Process Flow: Principles, Mechanisms, and Integration Logic
  • 142RMG14nm FinFET Replacement Metal Gate Integration Process Flow: Principles, Mechanisms, and Integration Logic
  • 159PMD214nm FinFET Second Pre-Metal Dielectric Integration: Process Flow Principles and Mechanisms
  • 195CONTACT_MR14nm FinFET PMD Surface Recess and Metal-Resistor Integration
  • 204CONTACT_CT14nm FinFET Contact Trench Integration Process Flow: Physics, Mechanisms, and Module Dependencies
  • 99SD_ESIGE14nm FinFET Embedded Silicon Germanium Source-Drain Integration: Process Flow Principles and Strain Engineering Mechanisms
  • 112SD_ESI14nm FinFET Epitaxial Silicon Source-Drain Integration Process Flow: Principles, Mechanisms, and Integration Logic
  • 165CONTACT_SC14nm FinFET Self-Aligned Contact Integration: Process Flow Principles and Mechanisms
  • 235CONTACT_CG14nm FinFET Gate Contact Integration: Process Flow, Physics, and Module Dependencies Explained
  • 263M114nm FinFET Metal-One Interconnect Integration: Process Flow, Physics, and Module Dependencies
  • 313M214nm FinFET Metal-Two Interconnect Integration: Process Flow, Physics, and Module Dependencies