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14nm Process FlowFinFET

Advanced process node with 3D transistor architecture. Explore FinFET integration, multi-patterning, and advanced interconnect technologies.

14nm FinFET

362 steps

Step index

  • Wafer Start · substrate
  • Fin Pattern · Pad Oxide Growth
  • Fin Pattern · Pad Nitride Deposition
  • Fin Pattern · Stop Oxide Deposition
  • Fin Pattern · a-Si Hardmask Deposition
View full flow →

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