PMD 2 - Deposition is a critical bulk dielectric deposition step within the Middle-of-Line (MOL) module, occurring after the initial PMD 1 gap-fill and Contact Etch Stop Layers (CESL) (Engineering Practice).Its primary function is to build sufficient dielectric thickness to electrically isolate the Front-End-of-Line (FEOL) devices from the upcoming first metal interconnects (M1) P1.As device dimensions scale down to 40nm, a single PMD deposition step cannot simultaneously satisfy the stringent r