PMD 2 - Deposition - 40nm | SemiFlows

40nm BSI CMOS Image SensorFree after sign-in

108/ 417

PMD 2 - Deposition

105CESL 1 - Deposition 106CESL 2 - Deposition 107PMD 1 - Deposition 108PMD 2 - Deposition 109PMD 3 - Deposition 110PMD 3 CMP 111Post CMP Cleaning

Process Cross-Section

Loading visual…

Step highlight

PMD 2 extends the dielectric volume above PMD 1 to support subsequent interconnect layers (Engineering Practice).

In depth

PMD 2 is the body segment of the same PMD stack and adds dielectric volume above PMD 1. Its relatively thicker illustrated band expresses structural role only; the schematic is not to …

Related steps

CESL 1 - Deposition
CESL 2 - Deposition
PMD 1 - Deposition
PMD 3 - Deposition
PMD 3 CMP
Post CMP Cleaning