PMD 3 - Deposition - 40nm | SemiFlows

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PMD 3 - Deposition

105CESL 1 - Deposition 106CESL 2 - Deposition 107PMD 1 - Deposition 108PMD 2 - Deposition 109PMD 3 - Deposition 110PMD 3 CMP 111Post CMP Cleaning

Process Cross-Section

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Step highlight

PMD 3 provides dielectric material for the following CMP step and forms part of a continuous insulator with PMD 1 and PMD 2 [(Engineering Practice)].

In depth

PMD 3 is the upper segment of the same PMD stack and provides dielectric material for the following CMP step. Together with PMD 1 and PMD 2 it forms…

Related steps

CESL 1 - Deposition
CESL 2 - Deposition
PMD 1 - Deposition
PMD 2 - Deposition
PMD 3 CMP
Post CMP Cleaning