PMD 3 CMP - 40nm BSI CMOS Image Sensor 40nm | SemiFlows

40nm BSI CMOS Image SensorFree after sign-in

110/ 417

PMD 3 CMP

105CESL 1 - Deposition 106CESL 2 - Deposition 107PMD 1 - Deposition 108PMD 2 - Deposition 109PMD 3 - Deposition 110PMD 3 CMP 111Post CMP Cleaning

Process Cross-Section

Loading visual…

Step highlight

CMP flattens the three deposited PMD segments into a planar surface, enabling accurate CN0 contact lithography (Engineering Practice).

In depth

CMP converts the three deposited PMD segments into a planar stack surface for the following CN0 contact lithography. The retained upper portion continues to be tr…

Related steps

CESL 1 - Deposition
CESL 2 - Deposition
PMD 1 - Deposition
PMD 2 - Deposition
PMD 3 - Deposition
Post CMP Cleaning