PMD 1 - Deposition - 40nm | SemiFlows

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PMD 1 - Deposition

105CESL 1 - Deposition 106CESL 2 - Deposition 107PMD 1 - Deposition 108PMD 2 - Deposition 109PMD 3 - Deposition 110PMD 3 CMP 111Post CMP Cleaning

Process Cross-Section

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Step highlight

PMD 1 deposition covers the device surface topography and provides a foundation for the subsequent dielectric layer (Engineering Practice).

In depth

PMD 1 is the bottom deposition segment of one pre-metal dielectric stack. It covers the device topography and supports the following body segment; it is not …

Related steps

CESL 1 - Deposition
CESL 2 - Deposition
PMD 2 - Deposition
PMD 3 - Deposition
PMD 3 CMP
Post CMP Cleaning