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7nm Process FlowFinFET

Cutting-edge process node with advanced FinFET architecture and multi-patterning. Explore self-aligned contacts, advanced interconnect, and packaging technologies.

7nm FinFET

714 steps

Step index

  • Wafer Start · Starting Wafer
  • STI · Pad Oxidation Pre Clean
  • STI · Pad Oxide Growth
  • STI · SiN Hardmask Deposition
  • STI · Transfer Oxide Deposition
View full flow →

Node knowledge map

7nm Process Integration Library

Start with the node overview, then open the physics and integration logic for each module. Every article returns to its exact Flow step.

Node overview7nm FinFET Process Flow: Integration Principles, Device Physics, and Module Dependencies
  1. 01WFR7nm FinFET Starting Wafer and Substrate Preparation: Integration Principles, Device Physics, and Process Flow
  2. 02STI7nm FinFET Pad Oxidation Pre-Clean: Integration Principles and Surface Physics
  3. 95GATE7nm FinFET Thick Gate Oxide Growth Process Flow: Physical Mechanisms, Integration Logic, and Device Physics
  4. 119SD

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7nm FinFET Source-Drain Integration: Process Flow Principles, Device Physics, and Module Dependencies
  • 155POP7nm FinFET Dummy-Poly Opening and Planarization Process Flow: Integration Principles, Physical Mechanisms, and Module Dependencies
  • 182RMG7nm FinFET Replacement Metal Gate Integration Process Flow: Principles, Mechanisms, and Integration Logic
  • 223CON7nm FinFET Contact Integration Process Flow: Principles, Mechanisms, and Integration Logic
  • 335VC7nm FinFET Contact-Via Integration Process Flow: Principles, Mechanisms, and Module Dependencies
  • 382M07nm FinFET Metal-Zero Interconnect Integration: Process Flow Principles, ESL Deposition Mechanics, and Module Dependencies
  • 449M17nm FinFET Metal-One Interconnect Integration: Process Flow Principles and ESL Deposition Mechanics
  • 539M27nm FinFET Metal-Two Interconnect Integration: Process Flow Principles and ESL Deposition Mechanics
  • 590M37nm FinFET M3 Interconnect Integration: Process Flow Principles and ESL Mechanics
  • 629M4_M87nm FinFET Mid-Level Interconnect Integration: Process Flow Principles and Module Dependencies
  • 652M97nm FinFET Metal-Nine Interconnect Integration: ESL Chemistry, Damascene Logic, and Module Dependencies
  • 671M107nm FinFET Metal-Ten Interconnect Integration: Process Flow Principles, ESL Chemistry, and Module Dependencies
  • 685M117nm FinFET Metal-Eleven Interconnect Integration: Process Flow Principles, ESL Chemistry, and Module Dependencies
  • 699M127nm FinFET Top-Metal Interconnect Integration: M12 Module Process Flow Principles and ESL Chemistry