Deposition of transfer oxide creates a chemically compatible and mechanically compliant layer between nitride hardmask and subsequent films, preventing adhesion loss during deep STI pattern transfer [P3].
Transfer Oxide Deposition is introduced immediately after SiN hardmask deposition in the STI module to establish a chemically compatible and mechanically compliant interlayer between the nitride hardmask stack and subsequent stop-nitride and amorpho…
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