28nm Planar Flow 28nm Process Step | SemiFlows
28nm Planar Flow
Preview
Share
EN
/
中
STI CMP
29
/ 266
Locked step
High-k HfO2 Deposition
29
/
266
Locked step
Overview
Active Area
7
STI
18
Well
7
+7 steps
Gate
27
Implant
33
Source/Drain
11
Spacer
6
Source/Drain
17
MOL
23
Contact
5
RMG
13
Metal 1
8
Contact
12
Metal 1
17
Metal 2
20
Upper Metal
19
Resistor Via
15
CB Passivation
8
Choose your access
Choose an unlock option
28nm
Every step and diagram in this node
Loading…
Full Bundle
Lifetime 28nm + 14nm + 7nm
Loading…
All Access Pro
Lifetime nodes + one year of Pro AI
Loading…
Checking sign-in status
One payment. Lifetime access.
Loading prices for your billing region…
Explore the free guide
14-day money-back guarantee