14nm · Node lesson
How do SOG, SOC and FCVD differ?
Compare SOG, SOC and FCVD by material class, film formation method and post-deposition treatment.
- Distinguish the materials and formation methods of SOG, SOC and FCVD.
- Compare surface coverage, gap fill and planarization.
- Identify the FCVD steps available in the 14nm Flow.
The related Flow provides FCVD steps, not dedicated SOG or SOC sequences.
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