28nm · Node lesson

Via first or trench first: what does the next step receive?

Compare via-first and trench-first routes, including temporary fill and subsequent metallization.

• Identify via, trench and temporary-fill states.
• Compare the structural conditions passed to the next operation by each route.
• Distinguish a final cross-section from evidence of process order.

The 28nm Flow provides V1/M2 reference steps. A final cross-section alone does not establish via-first or trench-first order.

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