Upper OCL - Coat/Expose/Develop/bake - 40nm | SemiFlows

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Upper OCL planarization (base) layer Coat/Bake

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Upper OCL - Coat/Expose/Develop/bake

376Upper OCL planarization (base) layer Coat/Bake 377Upper OCL - Coat/Expose/Develop/bake 378Upper OCL Reflow 379Final UV/Hard Bake 380Upper OCL Coating (protective oxide)381Pre Litho Cleaning

Process Cross-Section

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Step highlight

a soft bake drives out residual developer solvents and stabilizes the polymer matrix, providing the structural integrity required to prevent premature deformation before the high-temperature reflow stage [A2].

In depth

Following the fabrication and thermal curing of the Color Filter Arrays (CFA) and the subs…

Related steps

Upper OCL planarization (base) layer Coat/Bake
Upper OCL Reflow
Final UV/Hard Bake
Upper OCL Coating (protective oxide)
Pre Litho Cleaning