In a 40nm backside-illuminated (BSI) CMOS image sensor, color designation is accomplished by coating the sensor array elements with dedicated red, green, or blue filter films T1.This specific step forms the blue color filter array over the underlying pinned photodiodes, determining the wavelength-dependent incident photon flux for those specific pixels P2.In the integration flow, this step immediately follows the green color filter formation and its final hard bake, and precedes the red color fi