14nm FinFET 14nm Process Step | SemiFlows
14nm FinFET
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SiO2 CMP to SiN Stop
53
/ 362
Locked step
Fin Recess Etch
53
/
362
Locked step
Overview
Wafer Start
1
Fin Pattern
16
Fin Cut
11
STI
24
STI Notch
12
+12 steps
Fin Recess
3
Gate
25
Implant
4
Spacer
2
Embedded SiGe
13
Embedded Si Epi
17
CESL + PMD
13
RMG
17
PMD2
6
S/D Contact
30
Metal Resistor
9
Contact Trench
31
Gate Contact
28
Metal 1
50
Metal 2
50
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