7nm FinFET 7nm Process Step | SemiFlows
7nm FinFET
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Via Contact Metallization CMP
699
/ 714
Locked step
Passivation SiN Deposition
699
/
714
Locked step
Overview
Wafer Start
1
STI
93
Gate
24
Source/Drain
36
Poly Open Polish
27
RMG
41
Contact
112
Via Contact
47
Metal 0
67
Metal 1
90
Metal 2
51
Metal 3
39
Intermediate Metal (M4-M8)
23
Metal 9
19
Metal 10
14
Metal 11
14
Metal 12
16
714
Passivation SiN Deposition
+15 steps
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7nm
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